MILPITAS, CA-- Nanometrics Inc., a provider of advanced process control metrology systems, today announced financial results for its fourth quarter and fiscal year ended December 31, 2011.

Fourth Quarter highlights include:

  • Revenues of $45.3 million, exceeding guidance;
  • Introduction of the Atlas II flagship metrology system for optical critical dimension (OCD) process control;
  • Milestone achievement of over 1,000 OCD recipes in production at customer sites; and
  • Expansion of the company's product offering into the large and growing process control inspection market with the acquisition of Nanda Technologies. Fiscal 2011 highlights include:

  • Record revenues of $230 million, up 22% year-over-year;
  • Net cash and investments increased 47% for the year, up $31.2 million to $97.7 million at year-end; and
  • Continuing significant competitive wins, including several tool-of-record selections for Nanometrics automated and integrated OCD solutions for next-generation semiconductor devices, as well as multiple customer orders for UniFire systems for advanced 3-D wafer-scale packaging applications and the company's first 450mm systems, scheduled for delivery in 2012.